000134993 001__ 134993
000134993 005__ 20181203021510.0
000134993 0247_ $$2doi$$a10.1088/0960-1317/19/4/045019
000134993 022__ $$a0960-1317
000134993 02470 $$2ISI$$a000264575800019
000134993 037__ $$aARTICLE
000134993 245__ $$aIntegrated out-of-plane nanoelectrospray thruster arrays for spacecraft propulsion
000134993 269__ $$a2009
000134993 260__ $$bInstitute of Physics$$c2009
000134993 336__ $$aJournal Articles
000134993 520__ $$aNanoelectrosprays, well known for their use in sample injection for the mass spectrometry of large biomolecules, can also be used in other applications such as spacecraft propulsion. The thrust generated by a single electrospray emitter is well below 1 μN, which is several orders of magnitude below the required thrust for planned formation flying missions. This paper presents the process flow and the microfabrication of large 2D arrays of out-of-plane nanoelectrospray capillary emitters with integrated extractor electrodes as well as electrospray results. The capillaries, 70 μm high and with 24 μm inner diameter, are etched from one silicon-on-insulator wafer. The extractor electrodes are from another silicon-on-insulator wafer. Both parts are passively aligned to within 2 μm, centering each capillary under one extractor electrode, thus ensuring highly uniform emitter characteristics over large arrays. Low hydraulic impedance has been a major problem in out-of-plane electrospray designs in the past, which is solved here by adding a post-processing step in which the capillaries are filled with 5 μm silica microspheres fixed in place by silanization. Finally, this paper reports on successful spray tests carried out under vacuum conditions with single and arrays of capillaries spraying the ionic liquid EMI-Tf2 N demonstrating the operation of our nanoelectrospray thrusters in an ionic mode.
000134993 6531_ $$aElectrospray
000134993 6531_ $$aMEMS propulsion
000134993 6531_ $$acolloid thruster
000134993 6531_ $$aionic liquid
000134993 6531_ $$aion source
000134993 700__ $$aKrpoun, Renato
000134993 700__ $$0240376$$aShea, Herbert$$g162368
000134993 773__ $$j19$$q045019-045029$$tJOURNAL OF MICROMECHANICS AND MICROENGINEERING
000134993 8564_ $$uhttp://dx.doi.org/10.1088/0960-1317/19/4/045019$$zURL
000134993 8564_ $$s1070255$$uhttps://infoscience.epfl.ch/record/134993/files/jmm2009%20Krpoun%20_4_045019.pdf$$yn/a$$zn/a
000134993 909C0 $$0252107$$pLMTS$$xU10955
000134993 909CO $$ooai:infoscience.tind.io:134993$$pSTI$$pGLOBAL_SET$$particle
000134993 937__ $$aLMTS-ARTICLE-2009-001
000134993 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000134993 980__ $$aARTICLE