KFM detection of quantified charges injected into a thin SiO2 layer containing Si nps embedded by ultra low energy ion implantation using stencil lithography
2008
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Details
Title
KFM detection of quantified charges injected into a thin SiO2 layer containing Si nps embedded by ultra low energy ion implantation using stencil lithography
Author(s)
Dumas, C. ; Ressier, L. ; Grisolia, J. ; Arbouet, A. ; Paillard, V. ; BenAssayag, G. ; Bonafos, C. ; van den Boogaart, M.A.F. ; Savu, V. ; Brugger, J. ; Normand, P.
Published in
Materials and emerging technologies for non-volatile-memory devices
Conference
European Materials Research Society (EMRS 2008): Symposium H: Materials and emerging technologies for non-volatile-memory devices, Strasbourg, France, June 26-30 2008.
Date
2008
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-03-03