Controlled synthesis of silicon nanocrystals into a thin SiO2 layer synthesized by stencil-masked ultra-low energy ion implantation
2008
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Title
Controlled synthesis of silicon nanocrystals into a thin SiO2 layer synthesized by stencil-masked ultra-low energy ion implantation
Author(s)
Dumas, C. ; Grisolia, J. ; BenAssayag, G. ; Bonafos, C. ; Schamm, S. ; Arbouet, A. ; Paillard, V. ; Van den Boogaart, M.A.F. ; Brugger, J. ; Normand, P.
Published in
Symposium on Emerging Technologies for Micro-nanofabrication
Conference
French Symposium on Emerging Technologies for Micro-nanofabrication, Toulouse, France, November 19-21, 2008
Date
2008
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-03-03