Direct fabrication of NIL stamps using Stencil Lithography
2008
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Details
Title
Direct fabrication of NIL stamps using Stencil Lithography
Author(s)
Villanueva, G. ; Vazquez-Mena, O. ; Kiefer, T. ; Brugger, J.
Conference
Eurosensors XXII, Dresden, Germany, September 7-10, 2008
Date
2008
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Work produced at EPFL
Published
Posters
Record creation date
2009-03-02