Analysis and Applications of Nanostructures Created by Stencil Lithography
2009
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Title
Analysis and Applications of Nanostructures Created by Stencil Lithography
Author(s)
Vázquez-Mena, O. ; Sannomiya, T. ; Tosun, M. ; Voros, J. ; Villanueva, G. ; Brugger, J.
Conference
The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009
Date
2009
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Record creation date
2009-03-02