Resistless ion implantation of sub-micron scale features through nano-stencil
Villanueva, G.; Martin, C.; Vazquez-Mena, O.; Montserrat, J.; Langlet, P.; Bausells, J.; Brugger, J.
2008

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Resistless ion implantation of sub-micron scale features through nano-stencil

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Title Resistless ion implantation of sub-micron scale features through nano-stencil
Author(s) Villanueva, G. ; Martin, C. ; Vazquez-Mena, O. ; Montserrat, J. ; Langlet, P. ; Bausells, J. ; Brugger, J.
Conference 34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008
Date 2008
Laboratories LMIS1
NEMS
Record Appears in Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Work produced at EPFL
Published
Posters
Record creation date 2009-03-02

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