Resistless ion implantation of sub-micron scale features through nano-stencil
2008
Files
Abstract
Resistless ion implantation of sub-micron scale features through nano-stencil
Details
Title
Resistless ion implantation of sub-micron scale features through nano-stencil
Author(s)
Villanueva, G. ; Martin, C. ; Vazquez-Mena, O. ; Montserrat, J. ; Langlet, P. ; Bausells, J. ; Brugger, J.
Conference
34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008
Date
2008
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Work produced at EPFL
Published
Posters
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Work produced at EPFL
Published
Posters
Record creation date
2009-03-02