English
Français
Search
Browse Collections
Help
English
Français
login
login
Home
> >
Experimental study of electrical breakdown in MEMS devices with micrometer scale gaps
> Access to Fulltext
Information
Usage statistics
Files
Experimental study of electrical breakdown in MEMS[...]
-
Carazzetti, Patrick
et al
main
file(s):
Carazzeti08_spie proc 6884
version 1
Carazzeti08_spie proc 6884.pdf
[805.71 KB]
27 Jan 2018, 13:11
n/a