Towards the correlation of mechanical properties and sawing parameters of silicon wafers
2007
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Title
Towards the correlation of mechanical properties and sawing parameters of silicon wafers
Author(s)
Bidiville, A. ; Wasmer, K. ; Michler, J. ; Ballif, C. ; van der Meer, Mathijs Pieter ; Nasch, P.M.
Date
2007
Note
IMT-NE Number: 471
Laboratories
PV-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > PV-LAB - Photovoltaics and Thin Film Electronics Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date
2009-02-10