Plasma depositon processes for nanocomposite TiN/SiNx coatings


Published in:
Transactions of the Indian Institute of Metals, 58(6), 957-963
Year:
2005
Note:
IMT-NE Number: 447
Laboratories:


Note: The status of this file is: Involved Laboratories Only


 Record created 2009-02-10, last modified 2018-03-17

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