A Novel Low Noise Hydrogenated Amorphous Silicon Pixel Detector

Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 μm pitch based on a n-i-p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using beta particles from 63Ni and 90Sr sources was performed. © 2004 Elsevier B.V. All rights reserved.


Published in:
J. of Non-Cryst. Sol., 338-340, 729-731
Year:
2004
Note:
IMT-NE Number: 380
Laboratories:


Note: The status of this file is: Involved Laboratories Only


 Record created 2009-02-10, last modified 2018-09-13

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