000133903 001__ 133903
000133903 005__ 20190316234502.0
000133903 037__ $$aCONF
000133903 245__ $$aMicrocrystalline Silicon for Solar Cells Deposited at High Rate by VHF-GD at High Pressure
000133903 269__ $$a2004
000133903 260__ $$c2004
000133903 336__ $$aConference Papers
000133903 500__ $$aIMT-NE Number: 366
000133903 700__ $$aGraf, U. S.
000133903 700__ $$aMeier, J.
000133903 700__ $$aShah, A.
000133903 773__ $$q1663-1666$$t3rd World Conference on Photovoltaic Energy Conversion
000133903 8564_ $$s173410$$uhttps://infoscience.epfl.ch/record/133903/files/preprint_366.pdf$$zn/a
000133903 909C0 $$0252194$$pPV-LAB$$xU11963
000133903 909CO $$ooai:infoscience.tind.io:133903$$pconf$$pSTI$$qGLOBAL_SET
000133903 937__ $$aPV-LAB-CONF-2004-006
000133903 973__ $$aOTHER$$rREVIEWED$$sPUBLISHED
000133903 980__ $$aCONF