Infoscience

Journal article

Characterization of 13 µm and 30 µm thick Hydrogenated Amorphous Silicon Diodes Deposited over CMOS Integrated Circuits for Particle Detection Applications

We present the experimental results obtained with a novel monolithic silicon pixel detector which consists in depositing a n-i-p hydrogenated amorphous silicon (a-Si:H) diode straight above the readout ASIC (this technology is called Thin Film on ASIC, TFA). The characterization has been performed on 13 and 30μm thick a-Si:H films deposited on top of an ASIC containing a linear array of high-speed low-noise transimpedance amplifiers designed in a 0.25μm CMOS technology. Experimental results presented have been obtained with a 600nm pulsed laser. The results of charge collection efficiency and charge collection speed of these structures are discussed. © 2003 Elsevier B.V. All rights reserved.

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