Influence of Substrate on the Microstructure of Microcrystalline Silicon Layers and Cells

Hydrogenated microcrystalline silicon i-layers were deposited with a fixed silane concentration on various substrates and incorporated into n-i-p solar cells. 'Average crystallinity' and detailed microstructure of layers and devices were evaluated by X-ray diffraction (XRD) and transmission electron microscopy (TEM), respectively. The role of the substrate is thereby shown to be very critical; a change in the substrate can cause a transition from amorphous to microcrystalline growth in micrometer-thick layers. When crystalline growth occurs, the layer microstructure is depth-dependent. © 2002 Elsevier Science B.V. All rights reserved.


Published in:
J. Non-Crystalline Solids, 299-302, 1219-1223
Year:
2002
Note:
IMT-NE Number: 339
Laboratories:


Note: The status of this file is: Involved Laboratories Only


 Record created 2009-02-10, last modified 2018-11-14

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