In microcrystalline hydrogenated silicon (μc-Si:H), the drift mobility dependencies of holes on electric field and temperature have been measured by using a method of equilibrium charge extraction by linearly increasing voltage. At room temperature the estimated value of the drift mobility of holes is much lower than in crystalline silicon and slightly higher than in amorphous hydrogenated silicon (a-Si:H). In the case of stochastic transport of charge carriers with energetically distributed localized states, the numerical model of this method gives insight into the mobility dependence on electric field. From the numerical modeling and experimental measurement results, it follows that the hole drift mobility dependence on electric field is predetermined by electric field stimulated release from localized states. © 2001 American Institute of Physics.