Evolution of the Microstructure in Microcrystalline Silicon Prepared by Very High Frequency Glow-Discharge using Hydrogen Dilution


Published in:
J. Appl. Phys., 87 (6), 3137-3142
Year:
2000
Note:
IMT-NE Number: 313
Laboratories:


Note: The status of this file is: Involved Laboratories Only


 Record created 2009-02-10, last modified 2018-12-03

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