000133842 001__ 133842
000133842 005__ 20181024201344.0
000133842 037__ $$aCONF
000133842 245__ $$aThe Influence of Plasma Chemistry on the Deposition of Microcrystalline Silicon for Large Area Photovoltaic Solar Cells
000133842 269__ $$a2000
000133842 260__ $$c2000
000133842 336__ $$aConference Papers
000133842 500__ $$aIMT-NE Number: 320
000133842 700__ $$aHowling, A. A.
000133842 700__ $$aSansonnens, L.
000133842 700__ $$aBallutaud, J.
000133842 700__ $$aGrangeon, F.
000133842 700__ $$aDelachaux, T.
000133842 700__ $$aHollenstein, Ch.
000133842 700__ $$aDaudrix, V.
000133842 700__ $$aKroll, U.
000133842 773__ $$t16th EC Photovoltaic Solar Energy Conference$$q518-521
000133842 909C0 $$xU11963$$0252194$$pPV-LAB
000133842 909CO $$pconf$$pSTI$$ooai:infoscience.tind.io:133842
000133842 937__ $$aPV-LAB-CONF-2000-008
000133842 973__ $$rREVIEWED$$sPUBLISHED$$aOTHER
000133842 980__ $$aCONF