Fast Deposition of µc-Si:H by Restrictive Dilution and Enhanced HF-Power
1997
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Details
Title
Fast Deposition of µc-Si:H by Restrictive Dilution and Enhanced HF-Power
Author(s)
Torres, P. ; Keppner, H. ; Meier, J. ; Kroll, U. ; Beck, N. ; Shah, A.
Published in
physica status solidi (a)
Volume
163
Issue
2
Pages
R9-R10
Date
1997
Note
IMT-NE Number: 258
Laboratories
PV-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > PV-LAB - Photovoltaics and Thin Film Electronics Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-02-10