000133805 001__ 133805
000133805 005__ 20180913055104.0
000133805 037__ $$aARTICLE
000133805 245__ $$aFast Deposition of µc-Si:H by Restrictive Dilution and Enhanced HF-Power
000133805 269__ $$a1997
000133805 260__ $$c1997
000133805 336__ $$aJournal Articles
000133805 500__ $$aIMT-NE Number: 258
000133805 700__ $$aTorres, P.
000133805 700__ $$aKeppner, H.
000133805 700__ $$aMeier, J.
000133805 700__ $$aKroll, U.
000133805 700__ $$aBeck, N.
000133805 700__ $$aShah, A.
000133805 773__ $$j97-039$$tRapid Research Notes: physica status solidi
000133805 8564_ $$s116517$$uhttps://infoscience.epfl.ch/record/133805/files/paper_258%5B1%5D.pdf$$zn/a
000133805 909C0 $$0252194$$pPV-LAB$$xU11963
000133805 909CO $$ooai:infoscience.tind.io:133805$$pSTI$$particle
000133805 937__ $$aPV-LAB-ARTICLE-1997-009
000133805 973__ $$aOTHER$$rREVIEWED$$sPUBLISHED
000133805 980__ $$aARTICLE