Fast Deposition of µc-Si:H by Restrictive Dilution and Enhanced HF-Power


Published in:
Rapid Research Notes: physica status solidi, 97-039
Year:
1997
Note:
IMT-NE Number: 258
Laboratories:


Note: The status of this file is: Involved Laboratories Only


 Record created 2009-02-10, last modified 2018-03-17

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