Enlarged Parameter Space by Use of VHF-GD for Deposition of Thin
Type µc-Si:H Films
1997
Files
Details
Title
Enlarged Parameter Space by Use of VHF-GD for Deposition of Thin
Type µc-Si:H Films
Author(s)
Torres, P. ; Meier, J. ; Flückiger, R. ; Keppner, H. ; Shah, A.
Published in
MRS Proceedings
Volume
452
Pages
767-772
Date
1997
Note
IMT-NE Number: 239
Laboratories
PV-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > PV-LAB - Photovoltaics and Thin Film Electronics Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date
2009-02-10