Optical and Electrical Properties of Undoped Microcrystalline Silicon Deposited by the VHF-GD with Different Dilutions of Silane in Hydrogen
1997
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Title
Optical and Electrical Properties of Undoped Microcrystalline Silicon Deposited by the VHF-GD with Different Dilutions of Silane in Hydrogen
Author(s)
Beck, N. ; Torres, P. ; Fric, J. ; Remes, Z. ; Poruba, A. ; Stuchlikova, H. A. ; Fejfar, A. ; Wyrsch, N. ; Vanecek, M. ; Kocka, J. ; Shah, A.
Published in
MRS Proceedings
Volume
452
Pages
761-766
Date
1997
Note
IMT-NE Number: 237
Laboratories
PV-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > PV-LAB - Photovoltaics and Thin Film Electronics Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date
2009-02-10