Optical and Electrical Properties of Undoped Microcrystalline Silicon Deposited by the VHF-GD with Different Dilutions of Silane in Hydrogen


Published in:
MRS Symp., 452, 761-766
Year:
1997
Note:
IMT-NE Number: 237
Laboratories:




 Record created 2009-02-10, last modified 2018-09-13

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