Hydrogen in Amorphous and Microcrystalline Silicon Films prepared by Hydrogen Dilution


Published in:
J. Appl. Phys., 80, 4971-4975
Year:
1996
Note:
IMT-NE Number: 229
Laboratories:


Note: The status of this file is: Involved Laboratories Only


 Record created 2009-02-10, last modified 2018-03-17

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