Structural and Electrical Properties of Undoped Microcrystalline Silicon Grown by 70 MHz and 13.56 MHz PECVD
1994
Details
Title
Structural and Electrical Properties of Undoped Microcrystalline Silicon Grown by 70 MHz and 13.56 MHz PECVD
Author(s)
Flückiger, R. ; Meier, J. ; Crovini, G. ; Demichelis, F. ; Giorgis, F. ; Pirri, C.F. ; Tresso, E. ; Pohl, J. ; Rigato, V. ; Zandolin, S. ; Caccavale, F.
Published in
MRS Proceedings
Volume
358
Pages
751-756
Date
1994
ISSN
1946-4274
Note
IMT-NE Number: 187
Laboratories
PV-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > PV-LAB - Photovoltaics and Thin Film Electronics Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2009-02-10