Structural and Electrical Properties of Undoped Microcrystalline Silicon Grown by 70 MHz and 13.56 MHz PECVD


Published in:
MRS Proceedings, 358, 751-756
Year:
1994
ISSN:
1946-4274
Note:
IMT-NE Number: 187
Laboratories:




 Record created 2009-02-10, last modified 2018-09-13


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