Origins of Atmospheric Contaminations in Amorphous Silicon prepared by Very High Frequency (70 MHz) Glow Discharge


Published in:
Journal of Vacuum Science & Technology A, 13, 2742-2746
Year:
1995
Note:
IMT-NE Number: 215
Laboratories:


Note: The status of this file is: Involved Laboratories Only


 Record created 2009-02-10, last modified 2018-12-03

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