Very High Frequency Glow Discharge: Plasma- and Deposition Aspects
1995
Details
Title
Very High Frequency Glow Discharge: Plasma- and Deposition Aspects
Author(s)
Keppner, H. ; Kroll, U. ; Meier, J. ; Shah, A.
Published in
Solid State Phenomena
Volume
44-46
Pages
97-126
Date
1995
Note
IMT-NE Number: 202
Laboratories
PV-LAB