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Very High Frequency Glow Discharge: Plasma- and Deposition Aspects

Keppner, H. ; Kroll, U. ; Meier, J. ; Shah, A.

Published in:
Solid State Phenomena, 44-46, 97-126
Year:
1995
Note:
IMT-NE Number: 202
DOI:
10.4028/www.scientific.net/SSP.44-46.97
Laboratories:
PV-LAB

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > PV-LAB - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published



 Record created 2009-02-10, last modified 2018-12-03


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