Very High Frequency Glow Discharge: Plasma- and Deposition Aspects

• Published in: Solid State Phenomena, vol. 44-46, p. 97-126
• Publication date: 1995

Note:

IMT-NE Number: 202

Reference

• PV-LAB-ARTICLE-1995-007
• doi:10.4028/www.scientific.net/SSP.44-46.97

Record created on 2009-02-10, modified on 2017-05-10