Very High Frequency Glow Discharge: Plasma- and Deposition Aspects
Keppner, H.; Kroll, U.; Meier, J.; Shah, A.
1995

Details

Title Very High Frequency Glow Discharge: Plasma- and Deposition Aspects
Author(s) Keppner, H. ; Kroll, U. ; Meier, J. ; Shah, A.
Published in Solid State Phenomena
Volume 44-46
Pages 97-126
Date 1995
Note IMT-NE Number: 202
DOI 10.4028/www.scientific.net/SSP.44-46.97
Laboratories PV-LAB
Record Appears in Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > PV-LAB - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published

Actions