Structural, Optical and Electrical Properties of <p> µc-SiC:H Thin Films Deposited by the VHF-GD


Published in:
MRS Symp., 358, 793-798
Year:
1995
Note:
IMT-NE Number: 188
Laboratories:




 Record created 2009-02-10, last modified 2018-03-17


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