More Insight into the VHF-Glow-Discharge by Plasma Impedance Measurements
1994
Details
Title
More Insight into the VHF-Glow-Discharge by Plasma Impedance Measurements
Author(s)
Kroll, U. ; Ziegler, Y. ; Meier, J. ; Keppner, H. ; Shah, A.
Published in
MRS Symp.
Volume
336
Pages
115-120
Date
1994
Note
IMT-NE Number: 167
Laboratories
PV-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > PV-LAB - Photovoltaics and Thin Film Electronics Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-02-10