Low-power hermetically sealed on-chip plasma light source micromachined in glass
We report on the fabrication and testing of a chip-scale plasma light source. The device consists of a stack of three anodically bonded Pyrex wafers, which hermetically enclose a gas-filled cavity in which electrodes are used to ignite a low power (≪500 mW) RF plasma.
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Record created on 2009-02-02, modified on 2016-08-08