Crystallinity Uniformity of Microcrystalline Silicon Thin Films Deposited in Large Area Radio Frequency Capacitively-coupled Reactors
2008
Details
Title
Crystallinity Uniformity of Microcrystalline Silicon Thin Films Deposited in Large Area Radio Frequency Capacitively-coupled Reactors
Author(s)
Strahm, B. ; Howling, A.A. ; Hollenstein, Ch.
Published in
Amorphous and Polycrystalline Thin-Film Silicon Science and Technology—2008
Series
MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, 1066
Pages
3-14
Conference
Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology held at the 2008 MRS Spring Meeting, San Francisco, CA, March 25-28, 2008
Date
2008
Other identifier(s)
View record in Web of Science
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Conference Papers
Work produced at EPFL
Conference Papers
Work produced at EPFL
Record creation date
2009-01-28