Nanostructured ZnO-based layers deposited by non reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask
2008
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Title
Nanostructured ZnO-based layers deposited by non reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask
Author(s)
Barnabé, A. ; Lalanne, M. ; Presmanes, L. ; Tailhades, Ph. ; Dumas, C. ; Grisolia, J. ; Naceur, M. ; Arbouet, A. ; Paillard, V. ; BenAssayag, G. ; van den Boogaart, M.A.F. ; Brugger, J. ; Normand, P.
Conference
2nd International Symposium on Transparent Conductive Oxides, Hersonissos, Crete, Greece, October 22 - 26 2008
Date
2008
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Work produced at EPFL
Published
Posters
Record creation date
2009-01-26