Nanostructured ZnO-based layers deposited by non reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask


Presented at:
2nd International Symposium on Transparent Conductive Oxides, Hersonissos, Crete, Greece, October 22 - 26 2008
Year:
2008
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2009-01-26, last modified 2018-09-13

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