Laser-assisted microstructuring for Ti : sapphire channel-waveguide fabrication

We report on the fabrication of Ti:sapphire channel waveguides. Such channel waveguides are of interest, e.g., as low-threshold tunable lasers. We investigated several structuring methods including ion beam implantation followed by wet chemical etching strip loading by polyimide spin coating and subsequent laser micro-machining, direct laser ablation or reactive ion etching through laser-structured polyimide contact masks. The later two methods result in ribs having different widths and heights up to similar to5 mum. By reactive ion etching we have obtained channel waveguides with strong confinement of the Ti:sapphire fluorescence emission.


Published in:
Alt'02 International Conference on Advanced Laser Technologies, 5147, 363-369
Year:
2003
Keywords:
Note:
Weber, HP; Konov, VI; Graf, T
International Conference on Advanced Laser Technologies
SEP 15-20, 2002
ADELBODEN, SWITZERLAND
0-8194-5017-0
Laboratories:




 Record created 2009-01-20, last modified 2018-09-13


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)