000130720 001__ 130720
000130720 005__ 20190316234444.0
000130720 0247_ $$2doi$$a10.2174/157341306778699383
000130720 037__ $$aARTICLE
000130720 245__ $$aHigh Resolution Interference Microscopy: A Tool for Probing Optical Waves in the Far-Field on a Nanometric Length Scale
000130720 269__ $$a2006
000130720 260__ $$c2006
000130720 336__ $$aJournal Articles
000130720 520__ $$aHigh Resolution Interference Microscopy (HRIM) is a technique that allows the characterization of amplitude and phase of electromagnetic wave-fields in the far-field with a spatial accuracy that corresponds to a few nanometers in the object plane. Emphasis is put on the precise determination of topological features in the wave-field, called phase singularities or vortices, which are spatial points within the electromagnetic wave at which the amplitude is zero and the phase is hence not determined. An experimental tool working in transmission with a resolution of 20 nm in the object plane is presented and its application to the optical characterization of various single and periodic nanostructures such as trenches, gratings, microlenses and computer generated holograms is discussed. The conditions for the appearance of phase singularities are theoretically and experimentally outlined and it is shown how dislocation pairs can be used to determine unknown parameters from an object. Their corresponding applications to metrology or in optical data storage systems are analyzed. In addition, rigorous diffraction theory is used in all cases to simulate the interaction of light with the nano-optical structures to provide theoretical confirmation of the experimental results.
000130720 6531_ $$asuperresolution
000130720 6531_ $$ananophotonics
000130720 6531_ $$anano-optics
000130720 700__ $$aRockstuhl, Carsten
000130720 700__ $$0242968$$aMärki, Iwan$$g113676
000130720 700__ $$0243447$$aScharf, Toralf$$g190091
000130720 700__ $$aSalt, Martin
000130720 700__ $$0243453$$aHerzig, Hans Peter$$g155721
000130720 700__ $$0243803$$aDändliker, René$$g104849
000130720 773__ $$j2$$q337-350$$tCurrent Nanoscience
000130720 8564_ $$s884736$$uhttps://infoscience.epfl.ch/record/130720/files/Rockstuhl_Carsten_-_High_Resolution_Interference_Microscopy_20110622.pdf$$yn/a$$zn/a
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000130720 909C0 $$0252204$$pOPT
000130720 909c0 $$xU11965
000130720 909CO $$ooai:infoscience.tind.io:130720$$pSTI$$particle$$qGLOBAL_SET
000130720 917Z8 $$x102085
000130720 917Z8 $$x155721
000130720 917Z8 $$x155721
000130720 937__ $$aLOB-ARTICLE-2009-009
000130720 973__ $$aOTHER$$rREVIEWED$$sPUBLISHED
000130720 980__ $$aARTICLE