000130403 001__ 130403
000130403 005__ 20181203021404.0
000130403 0247_ $$2doi$$a10.1002/pip.857
000130403 02470 $$2ISI$$a000261819800004
000130403 037__ $$aARTICLE
000130403 245__ $$aUniformity of silicon microcrystallinity in large area RF capacitive reactors
000130403 269__ $$a2008
000130403 260__ $$c2008
000130403 336__ $$aJournal Articles
000130403 6531_ $$amicrocrystalline silicon; large area; uniformity
000130403 700__ $$0240529$$aStrahm, Benjamin$$g119771
000130403 700__ $$0240129$$aHollenstein, Christoph$$g105413
000130403 700__ $$0241906$$aHowling, Alan$$g105426
000130403 773__ $$j16$$q687-691$$tProgress in Photovoltaics
000130403 909C0 $$pCRPP
000130403 909C0 $$0252028$$pSPC
000130403 909CO $$ooai:infoscience.tind.io:130403$$pSB$$particle
000130403 937__ $$aCRPP-ARTICLE-2008-028
000130403 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000130403 980__ $$aARTICLE