Uniformity of silicon microcrystallinity in large area RF capacitive reactors
2008
Details
Title
Uniformity of silicon microcrystallinity in large area RF capacitive reactors
Author(s)
Strahm, Benjamin ; Hollenstein, Christoph ; Howling, Alan
Published in
Progress in Photovoltaics
Volume
16
Pages
687-691
Date
2008
Keywords
Other identifier(s)
View record in Web of Science
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2008-12-15