High-Q AlN/SiO2 Symmetric Composite Thin Film Bulk Acoustic Wave Resonators
2008
Details
Title
High-Q AlN/SiO2 Symmetric Composite Thin Film Bulk Acoustic Wave Resonators
Author(s)
Artieda, A. ; Muralt, P.
Published in
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
Volume
55
Issue
11
Pages
2463-2468
Date
2008
Other identifier(s)
DAR: 13753
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Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2008-11-04