High-Q AlN/SiO2 Symmetric Composite Thin Film Bulk Acoustic Wave Resonators


Published in:
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 55, 11, 2463-2468
Year:
2008
Other identifiers:
Laboratories:




 Record created 2008-11-04, last modified 2018-09-13


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