English
Français
Search
Browse Collections
Help
English
Français
login
login
Home
> >
Design, characterisation and modelling of a high current DC arc plasma source for silicon and silicon carbide processing at low pressure
> Access to Fulltext
Information
Usage statistics
Files
Design, characterisation and modelling of a high c[...]
-
Derendinger, Lukas
- 4238
main
file(s):
EPFL_TH4238
version 1
EPFL_TH4238.pdf
[67.63 MB]
27 Jan 2018, 13:43
Texte intégral / Full text
Texte intégral / Full text