000125855 001__ 125855
000125855 005__ 20190316234316.0
000125855 02470 $$2ISI$$a000257246800026
000125855 037__ $$aCONF
000125855 245__ $$aIon-implanted compliant and patternable electrodes for miniaturized dielectric elastomer actuators
000125855 269__ $$a2008
000125855 260__ $$c2008
000125855 336__ $$aConference Papers
000125855 520__ $$aThis article presents metal ion implantation as an alternative technique to fabricate compliant electrodes for small-size dielectric elastomer actuators. When reducing the size of these actuators to below 1 cm, the ability to pattern the electrodes is added to the need for compliance. Metal ion implantation on Polydimethylsiloxane (PDMS) layers allows the creation of conductive and compliant electrodes, which can be easily defined by photolithography or with a shadow mask. Mechanical testing show that implantation has a limited impact on the PDMS' properties, with a Young's modulus increase of 50%-200% depending on the dose. Uniaxial stretching tests show that conductivity is conserved for strains up to 50% and present no hysteresis. Dielectric breakdown tests were conducted for Au and Pd implantations, which exhibited high breakdown fields (>100 V/um), similar to non-implanted PDMS layers. Other advantages of ion implanted electrodes include transparency and a negligible mass. Buckling mode diaphragm actuators were fabricated with ion-implanted electrodes and exhibited out-of-plane displacements up to 7% of their lateral dimensions.
000125855 6531_ $$aDielectric elastomer actuator
000125855 6531_ $$aMetal ion implantation
000125855 6531_ $$aPolydimethylsiloxane
000125855 6531_ $$aElectrodes
000125855 700__ $$0241188$$g127048$$aRosset, Samuel
000125855 700__ $$0242917$$g137877$$aNiklaus, Muhamed
000125855 700__ $$0240308$$g168661$$aDubois, Philippe
000125855 700__ $$0240376$$g162368$$aShea, Herbert
000125855 7112_ $$dMarch 9-13, 2008$$cSan Diego$$aElectroactive Polymer Actuators and Devices (EAPAD)
000125855 773__ $$j6927$$tProceedings of SPIE$$q69270W-10
000125855 8564_ $$uhttps://infoscience.epfl.ch/record/125855/files/Rosset_SPIE_2008.pdf$$zn/a$$s1711811
000125855 909C0 $$xU10955$$0252107$$pLMTS
000125855 909CO $$qGLOBAL_SET$$pconf$$ooai:infoscience.tind.io:125855$$pSTI
000125855 937__ $$aLMTS-CONF-2008-007
000125855 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000125855 980__ $$aCONF