Files
Abstract
Direct fabrication of NEMS by etching through Stencil
Details
Title
Direct fabrication of NEMS by etching through Stencil
Author(s)
Villanueva, G. ; Brugger, J.
Conference
Micro Nano cantilever Sensors 2008 (MNCS 08), Mainz, Germany, May 19-21, 2008
Date
2008
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Record creation date
2008-06-02