Dynamic Stencil Lithography on Full Wafer Scale
2008
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Details
Title
Dynamic Stencil Lithography on Full Wafer Scale
Author(s)
van den Boogaart, M.A.F. ; Savu, V. ; Brugger, J.
Conference
The 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2008), Portland, Oregon, May 27–30, 2008
Date
2008
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Work produced at EPFL
Published
Posters
Record creation date
2008-06-02