Electromagnetic sources of nonuniformity in large area capacitive reactors


Published in:
Thin Solid Films, 515, special issue, 5059-5064
Presented at:
27th Dry Process Symposium, DPS2005, Jeju, Korea, 28-30 November 2005
Year:
2005
Publisher:
Elsevier
ISSN:
0040-6090
Note:
Invited talk, paper 8_02
Laboratories:
SPC
CRPP




 Record created 2008-05-13, last modified 2018-01-28

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