Application of the shaped electrode technique to a large area rectangular capacitively-coupled plasma reactor to suppress standing wave nonuniformity
2005
Details
Title
Application of the shaped electrode technique to a large area rectangular capacitively-coupled plasma reactor to suppress standing wave nonuniformity
Author(s)
Sansonnens, L. ; Schmidt, H. ; Howling, A.A. ; Hollenstein, Ch. ; Ellert, C. ; Buechel, A.
Conference
AVS 52st Int. Symposium & Exhibition
Date
2005
Note
AVS 52st Int. Symposium & Exhibition, Boston, USA, October 30 - November 1, 2005
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13