Infoscience

Conference paper

Application of the shaped electrode technique to a large area rectangular capacitively-coupled plasma reactor to suppress standing wave nonuniformity

    Note:

    AVS 52st Int. Symposium & Exhibition, Boston, USA, October 30 - November 1, 2005

    Reference

    • CRPP-CONF-2005-011

    Record created on 2008-05-13, modified on 2016-08-08

Fulltext

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