High-rate large-area silicon deposition by VHF plasma
2005
Details
Title
High-rate large-area silicon deposition by VHF plasma
Author(s)
Sansonnens, L. ; Hollenstein, Ch. ; Feitknecht, L. ; Shah, A. ; Ballif, Ch. ; Kroll, U.
Conference
Technical Symposium on CSEM
Date
2005
Note
Technical Symposium on CSEM, EPFL & IMT collaboration day, Micro and Nano Technology, Neuchatel, 17 October 2005
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13