High-rate large-area silicon deposition by VHF plasma


Presented at:
Technical Symposium on CSEM
Year:
2005
Note:
Technical Symposium on CSEM, EPFL & IMT collaboration day, Micro and Nano Technology, Neuchatel, 17 October 2005
Laboratories:
SPC
CRPP




 Record created 2008-05-13, last modified 2018-01-28


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