Elimination of electromagnetic non-uniformities in large-area RF plasma reactors used for thin-film deposition
2004
Details
Title
Elimination of electromagnetic non-uniformities in large-area RF plasma reactors used for thin-film deposition
Author(s)
Howling, A.A. ; Sansonnens, L. ; Schmitt, J.P.M. ; Ballutaud, J. ; Schmidt, H. ; Hollenstein, Ch.
Conference
Société Suisse de Physique
Date
2004
Note
Société Suisse de Physique, SPS Annual Meeting, Neuchâtel, 4 mars 2004
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13